LANANtek FA 2000系列探針臺
技術(shù)參數(shù)
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LANANtek FA Laser Mark All in One 系列
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主要特點
●可選配高溫測試環(huán)境
●可選直筒顯微鏡和體式顯微鏡
●載物臺可Z軸升降
●載物臺Theta可粗調(diào)360°，微調(diào)±7°
●載物臺XY移動分辨率為1um。
●可選配高壓高流測試環(huán)境
●快速裝片并可任意位置鎖定功能
●顯微鏡支架萬向桿
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選配附件
●激光修復
●低漏電電流/電容測試
●射頻測試探頭及電纜
●探針卡/封裝/PCB 板夾具
●有源探頭
●高壓高流模塊
●高清數(shù)字相機
●Hot Chuck
●載物臺水平調(diào)節(jié)機構(gòu)
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應用領域
●Failure analysis 集成電路失效分析
●Wafer level reliability 晶元可靠性認證
●Device characterization 元器件特性量測
●Process modeling 塑性過程測試(材料特性分析)
●IC Process monitoring 制成監(jiān)控
●Package part probing IC封裝階段打線品質(zhì)測試
●ESD&TDR testing ESD和TDR測試
●Microwave probing 微波量測(高頻測試)
●Solar太陽能領域檢測分析
●LED、OLED、LCD領域檢測分析、修復
●PCB領域檢測分析
●VESEL DFB,COC,硅光等光電器件測試
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兼容測試儀器
●各種型號示波器
●各品牌半導體參數(shù)分析儀，博測，是德，泰克，概倫等
●各種品牌的網(wǎng)絡分析儀，是德，羅德施瓦茨，思儀等
●各種品牌型號的源表
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LANANtek FA Laser Mark All in One 系列
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Built on the highly reliable flashlamp-pumped laser platform, the FiLaser FA-100 AIO laser system provides OEM customers
with a compact high energy laser system capable of delivering ~mJ pulse energies at 1064, 532, 355 and 266nm.
基于高可靠的閃光燈泵浦激光平臺，FiLaser FA-100 AIO激光系統(tǒng)為 OEM客戶提供了緊湊的高能激光系統(tǒng)，能夠在1064、532、355和
266nm提供~mJ脈沖能量。
The air-cooled architecture eliminates the weight and complexity of water cooling, and allows the FA-100 to be packaged into a smaller
and lighter single box and nearly maintenance-free. As a result, FA- 100 can be easily mounted on most of the leading types of failure
analysis microscopes and gantry systems.風冷結(jié)構(gòu)消除了水冷的重量和復雜性，并允許FA-100被包裝成一個更小、更輕的單個盒子，幾
乎無需維護。因此，FA-100可以很容易地安裝在大多數(shù)主要類型的失效分析顯微鏡和龍門系統(tǒng)上。
FA-100 AIO laser system is truly a hands free laser system that is designed to provide great flexibility in defining laser characteristics.
User-selectable wavelengths (1064 nm, 532 nm, 355 nm or 266 nm) and precise energy control (with >1000 steps) match the laser beam
parameters to the tasks. A built-in shutter produces highly uniform cuts from 50 μm x 50 μm (with 50X objective) to 1 μm x 1 μm
(with100X objective). FA-100 AIO激光系統(tǒng)是一個真正的自由激光系統(tǒng)，旨在提供巨大的靈活性定義激光特性。用戶可選擇波長(1064 nm,
532 nm, 355 nm或266 nm)和精確的能量控制(與1000步)匹配激光束參數(shù)的任務。內(nèi)置快門可以產(chǎn)生高度均勻的切割，從50 μm ×50
μm(50倍物鏡)到1 μm ×1 μm(100倍物鏡)
FA-100 is operated by a 24V DC source, and no additional power supply is needed. Proprietary optical design enables higher energy output without sacrificing operating lifetime, and ensures the best possible reliability and superior performance. FA-100由24V直流電源供電，無需額外電源。專有的光學設計可以在不犧牲工作壽命的
情況下實現(xiàn)更高的能量輸出，并確保最佳的可靠性和卓越的性能
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Features:產(chǎn)品特點
• All In One design removes the power supply and umbilical一體化設計；
• Air-cooled, Compact, No maintenance Needed風冷、結(jié)構(gòu)緊湊、免維護；
• 3 Operating modes: Single shot, Continuous (1 Hz), Burst (max. of 100 pulses at 5 Hz.)三種運行模式：單發(fā)模式 ，連續(xù)模式， BURST模式；
• Wavelengths Selectable for 1064 nm, 532 nm, 355 nm or 266 nm 波長可選：紅外、綠光、紫外、深紫外；
• Cutting size from 1μm x 1μm (under100X objective) to 50μm x 50μm (under 50X objective).切割尺寸從1μm ×1μm(100倍物鏡下)到50μm ×50μm(50倍物鏡下)；
• Simple communication via USB or remote control box通過USB或遠程控制盒進行簡單通信；
• Precise energy control with >1000 Steps 精確能量控制＞1000步；
• Optional Internal CCD camera 選配內(nèi)置同軸CCD相機；
• Internal LED or External Whitelight spot Marker 內(nèi)置LED或外部點光源；
• Mountable on most Failure Analysis microscopes可安裝在大多數(shù)失效分析的顯微鏡上；
Applications:應用
• Semiconductor Failure Analysis半導體失效分析；
• LCD Repair LCD面板修復；
• Micromachining 微加工；
• Resist Trimming 激光調(diào)阻修復
• Marking and Cutting 激光標記和切割
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